Introduction of semiconductor exhaust treatment methods

Semiconductor industry on the manipulation of room cleanliness requirements are extremely high, usually using fans to extract the process of volatile emissions of various types of exhaust gas for exhaust gas treatment, so the semiconductor industry exhaust emissions have a large volume of exhaust, emission concentration is small. Therefore, the semiconductor exhaust treatment method is generally used first concentration and then combustion treatment, the following with the Everest blue editor to understand.

Semiconductor exhaust emissions can be divided into four main categories: acidic gases, alkaline gases, organic waste gases and toxic gases.

Semiconductor waste gas treatment method is usually used first with zeolite rotor VOCs adsorption and concentration, and then destroyed by direct combustion method, the exhaust gas purification rate of 97% or more. Direct combustion is also known as direct flame combustion, it is the VOCs combustible components directly burned off, so the method is suitable for purification of combustible hazardous components of a high concentration of exhaust gas, or purification of hazardous components of the combustion of exhaust gas with a high calorific value; a variety of combustible gases or a variety of solvent vapours mixed in the exhaust, as long as the concentration of the value of the appropriate, but also can be directly combusted. If the concentration of combustible components is higher than the upper limit of combustion, can be mixed into the air after combustion; if the concentration of combustible components is lower than the lower limit of combustion, can be added to a certain number of auxiliary fuels, such as natural gas, etc., to maintain combustion.

Direct combustion method is generally used RTO regenerative thermal incinerator equipment, referred to as "RTO equipment", is the use of high-temperature destruction of the incineration of exhaust gas management technology. The use of heating energy is generally electricity and natural gas, although the use of high temperature 700 ℃ temperature for waste gas treatment, but the actual consumption of energy is not a few, this is due to the equipment can be recycled thermal energy, greatly reducing the energy consumption at the same time to improve the combustion reaction rate of waste gas molecules. The main body of the equipment consists of a combustion chamber, ceramic packing bed and conversion valve. The purification efficiency of the equipment is also maintained at more than 99%.